How does one etch LNO?

Processing
1

What is a good process for etching LiNbO3 waveguides?

2

Try this tool here: CAIBE (Oxford Ion Mill) - UCSB Nanofab Wiki
I’d suggest to start with an Argon milling recipe like this:

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Highlighted here is the closest to 90° sidewall, highest etch rate for the hardest material I have data, Pt. Should be a good starting point. Then can try some variations like adding CF4 (which creates volatile NbF products).

Testing posting a FabuBlox process (not actually relevant here): FabuBlox